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Metadados

1. Identificação
Tipo de ReferênciaArtigo em Revista Científica (Journal Article)
Sitemtc-m21b.sid.inpe.br
Código do Detentorisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identificador8JMKD3MGP3W34P/3MPQ6QP
Repositóriosid.inpe.br/mtc-m21b/2016/11.11.16.29   (acesso restrito)
Última Atualização2016:11.11.16.29.27 (UTC) simone
Repositório de Metadadossid.inpe.br/mtc-m21b/2016/11.11.16.29.27
Última Atualização dos Metadados2021:07.28.22.24.01 (UTC) administrator
DOI10.1088/0022-3727/49/37/375301
ISSN0022-3727
Chave de CitaçãoTestoniCPFMSGVM:2016:InAlPa
TítuloInfluence of the Al2O3 partial-monolayer number on the crystallization mechanism of TiO2 in ALD TiO2/Al2O3 nanolaminates and its impact on the material properties
Ano2016
MêsSept
Data de Acesso11 maio 2024
Tipo de Trabalhojournal article
Tipo SecundárioPRE PI
Número de Arquivos1
Tamanho3888 KiB
2. Contextualização
Autor1 Testoni, G. E.
2 Chiappim, W.
3 Pessoa, R. S.
4 Fraga, Mariana Amorim
5 Miyakawa, W.
6 Sakane, K. K.
7 Galvão, N. K. A. M.
8 Vieira, L.
9 Maciel, H. S.
Grupo1
2
3
4 LAS-CTE-INPE-MCTI-GOV-BR
Afiliação1 Universidade do Vale do Paraíba (UNIVAP)
2 Universidade do Vale do Paraíba (UNIVAP)
3 Universidade do Vale do Paraíba (UNIVAP)
4 Instituto Nacional de Pesquisas Espaciais (INPE)
5 Instituto de Estudos Avançados (IEAv)
6 Universidade do Vale do Paraíba (UNIVAP)
7 Instituto Tecnológico de Aeronáutica (ITA)
8 Universidade do Vale do Paraíba (UNIVAP)
9 Universidade do Vale do Paraíba (UNIVAP)
Endereço de e-Mail do Autor1
2
3 rspessoa@univap.br
4 mariana.fraga@inpe.br
RevistaJournal of Physics D: Applied Physics
Volume49
Número37
Páginas375301
Histórico (UTC)2016-11-11 16:29:27 :: simone -> administrator ::
2016-11-11 16:30:23 :: administrator -> simone :: 2016
2016-11-11 16:31:46 :: simone -> administrator :: 2016
2021-07-28 22:24:01 :: administrator -> simone :: 2016
3. Conteúdo e estrutura
É a matriz ou uma cópia?é a matriz
Estágio do Conteúdoconcluido
Transferível1
Tipo do ConteúdoExternal Contribution
Tipo de Versãopublisher
Palavras-Chavenanolaminate
titanium dioxide
aluminum oxide
atomic layer deposition
ResumoTiO2/Al2O3 nanolaminates are being investigated to obtain unique materials with chemical, physical, optical, electrical and mechanical properties for a broad range of applications that include electronic and energy storage devices. Here, we discuss the properties of TiO2/Al2O3 nanolaminate structures constructed on silicon (1 0 0) and glass substrates using atomic layer deposition (ALD) by alternatively depositing a TiO2 sublayer and Al2O3 partial-monolayer using TTIP-H2O and TMA-H2O precursors, respectively. The Al2O3 is formed by a single TMA-H2O cycle, so it is a partial-monolayer because of steric hindrance of the precursors, while the TiO2 sublayer is formed by several TTIP-H2O cycles. Overall, each nanolaminate incorporates a certain number of Al2O3 partial-monolayers with this number varying from 10-90 in the TiO2/Al2O3 nanolaminate grown during 2700 total reaction cycles of TiO2 at a temperature of 250 degrees C. The fundamental properties of the TiO2/Al2O3 nanolaminates, namely film thickness, chemical composition, microstructure and morphology were examined in order to better understand the influence of the number of Al2O3 partial-monolayers on the crystallization mechanism of TiO2. In addition, some optical, electrical and mechanical properties were determined and correlated with fundamental characteristics. The results show clearly the effect of Al2O3 partial-monolayers as an internal barrier, which promotes structural inhomogeneity in the film and influences the fundamental properties of the nanolaminate. These properties are correlated with gas phase analysis that evidenced the poisoning effect of trimethylaluminum (TMA) pulse during the TiO2 layer growth, perturbing the growth per cycle and consequently the overall film thickness. It was shown that the changes in the fundamental properties of TiO2/Al2O3 nanolaminates had little influence on optical properties such as band gap and transmittance. However, in contrast, electrical properties as resistivity and mechanical properties as hardness and elastic modulus were shown to be very dependent. From these analyses, several applications could be suggested for different kinds of nanolaminates obtained in this work.
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4. Condições de acesso e uso
Idiomaen
Arquivo Alvotestoni_influence.pdf
Grupo de Usuáriossimone
Grupo de Leitoresadministrator
simone
Visibilidadeshown
Permissão de Leituradeny from all and allow from 150.163
Permissão de Atualizaçãonão transferida
5. Fontes relacionadas
Repositório Espelhourlib.net/www/2011/03.29.20.55
Unidades Imediatamente Superiores8JMKD3MGPCW/3ESR3H2
Lista de Itens Citandosid.inpe.br/bibdigital/2013/09.24.19.30 1
DivulgaçãoWEBSCI; PORTALCAPES; SCOPUS.
Acervo Hospedeirosid.inpe.br/mtc-m21b/2013/09.26.14.25.20
6. Notas
Campos Vaziosalternatejournal archivingpolicy archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress format isbn label lineage mark nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project resumeid rightsholder schedulinginformation secondarydate secondarykey secondarymark session shorttitle sponsor subject tertiarymark tertiarytype url
7. Controle da descrição
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